Poluprovodnikovye Tenzochuvstvitel'nye Elementy Datchikov Davleniy (Paperback)

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Description


Davlenie yavlyaetsya odnoy iz osnovnykh velichin, svyazannykh's opisaniem zhidkikh i gazoobraznykh sred. Bol'shoe raznoobrazie sistem, v tom chisle i datchikovoy apparatury, dlya izmereniya davleniy ob"yasnyaetsya tem, chto ponyatie davlenie okhvatyvaet protyazhennuyu oblast' znacheniy - ot sverkhvysokogo vakuuma do sverkhvysokikh izbytochnykh davleniy. V dannoy rabote rassmatrivayutsya osnovy proektirovaniya, razrabotki, a takzhe tekhnologicheskie aspekty izgotovleniya poluprovodnikovykh tenzochuvstvitel'nykh elementov datchikov davleniy, v chastnosti, predstavleny obshchie voprosy izmereniya davleniya, tenzoeffekta, printsipy proektirovaniya, razrabotki topologii, termokompensatsii poluprovodnikovykh tenzochuvstvitel'nykh elementov, a takzhe rassmotreny osnovnye tekhnologicheskie operatsii i metody ikh izgotovleniya: khimicheskaya obrabotka plastin, okislenie, diffuziya, travlenie i dr.


Product Details
ISBN: 9783659103292
ISBN-10: 3659103292
Publisher: LAP Lambert Academic Publishing
Publication Date: April 27th, 2012
Pages: 188
Language: Russian