Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing (Hardcover)

Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Cover Image
By Takeshi Hattori (Editor), T. Hattori (Translator), S. Heusler (Translator)
$449.99
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Description


This book summarizes the knowledge and experience of the successful Japanese semiconductor companies. For the first time the secrets of processing of semiconductor surfaces for device production are disclosed. All the people and companies involved in manufacturing of silicon-based semiconductor devices should have this book.


Product Details
ISBN: 9783540616726
ISBN-10: 3540616721
Publisher: Springer
Publication Date: September 17th, 1998
Pages: 616
Language: English